The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 31, 2012
Filed:
Mar. 01, 2010
Yusuke Fujii, Hitachi, JP;
Kazuo Hiramoto, Hitachiohta, JP;
Yoshihiko Nagamine, Hitachi, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
In a charged particle irradiation system, forming a uniform dose distribution is required by irradiating a moving irradiation object through beam scanning and energy stacking. The charged particle irradiation system includes an ion beam generatorfrom which an ion beam is extracted with a target beam current value thereof set; an irradiation nozzlehaving scanning magnetsand an energy filter, the irradiation nozzlefor irradiating an irradiation object with the ion beam; and an irradiation object monitoring unitfor measuring a position of the irradiation object and outputting signals that vary with time according to displacement of the irradiation object. The charged particle irradiation system determines extraction timing of the ion beam based on the signal outputted from the irradiation object monitoring unitand sequentially changes energies of the ion beam to thereby perform a repainting irradiation with each of the energies.