The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 31, 2012
Filed:
May. 20, 2008
Akira Noda, Uji, JP;
Toshiyuki Shirai, Uji, JP;
Masahiro Ikegami, Uji, JP;
Shu Nakamura, Uji, JP;
Hiroyuki Daido, Kizukawa, JP;
Kouji Noda, Chiba, JP;
Akira Noda, Uji, JP;
Toshiyuki Shirai, Uji, JP;
Masahiro Ikegami, Uji, JP;
Shu Nakamura, Uji, JP;
Hiroyuki Daido, Kizukawa, JP;
Kouji Noda, Chiba, JP;
Kyoto University, , JP;
Abstract
Provided are an ion beam control apparatus and a control method for controlling an ion beam energy expansion level and an ion beam size in a radial direction. An ion beam control apparatus Sa is provided with an ion beam generating unit, and an ion beam control unitin which a generated ion beam (IB) is input and controlled to be output with the prescribed level of energy expansion and the prescribed diameter in the radial direction. In the ion beam control unit, phase rotation by a radio frequency electric field that increases existing probability with the prescribed level of energy is at least used.