The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 31, 2012
Filed:
Jun. 03, 2008
Applicants:
Markus Henry, Cologne, DE;
Christian Beyer, Cologne, DE;
Inventors:
Markus Henry, Cologne, DE;
Christian Beyer, Cologne, DE;
Assignee:
Oerlikon Leybold Vacuum GmbH, Cologne, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F04D 19/04 (2006.01);
U.S. Cl.
CPC ...
Abstract
The invention refers to a mass spectrometer arrangement () comprising a housing () having a mass spectrometer forevacuum vacuum chamber () with a mass spectrometer forevacuum outlet (), at least two mass spectrometer high-vacuum vacuum chambers (), and an integrated turbomolecular pump () connected with the high-vacuum vacuum chambers () and having a forevacuum outlet (). The two forevacuum outlets () open into a common forevacuum chamber () in the housing (), which in turn opens into a housing outlet ().