The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 24, 2012
Filed:
Jan. 23, 2009
Ville Kaajakari, Ruston, LA (US);
Ville Kaajakari, Ruston, LA (US);
VTI Technologies Oy, Vantaa, FI;
Abstract
The invention relates to design of micromechanical resonators and, more precisely, to the design of microelectromechanical systems (MEMS) resonators. The invention provides an improved design structure for a microelectromechanical systems (MEMS) resonator in which the width of the spring elements (), (-), (-) is greater than the width of the electrode fingers (-), (-), (-), said widths specifically dimensioned so that the sensitivity of the resonant frequency change with respect to dimensional manufacturing variations d(Δω/ω)/dδ approaches zero. The improved structure is frequency robust to manufacturing variations and enables reliable frequency referencing with good performance, particularly in small size solutions.