The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 24, 2012
Filed:
May. 22, 2009
Applicant:
Eiji Aoki, Utsunomiya, JP;
Inventor:
Eiji Aoki, Utsunomiya, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 1/20 (2006.01);
U.S. Cl.
CPC ...
Abstract
The present invention provides a measurement method of measuring a light beam wavefront formed by a measurement target object using a measurement apparatus which includes an optical system having a reference surface and a detection unit having a detection surface, and detects, by the detection unit, an interference pattern, between a test light beam from one of the measurement target object and a standard surface and a reference light beam from the reference surface, formed on the detection surface by the optical system.