The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 17, 2012
Filed:
Nov. 06, 2007
Damon Genetti, Livermore, CA (US);
Heinrich Von Bunau, San Jose, CA (US);
Tarek Radwan, Santa Clara, CA (US);
Karen Townsend, Santa Clara, CA (US);
Damon Genetti, Livermore, CA (US);
Heinrich Von Bunau, San Jose, CA (US);
Tarek Radwan, Santa Clara, CA (US);
Karen Townsend, Santa Clara, CA (US);
Novellus Systems, Inc., San Jose, CA (US);
Abstract
A method is provided for teaching a transfer robot used in conjunction with a workpiece processing system including a pedestal assembly, a light sensor having an optical input fixedly coupled to the pedestal assembly, a transfer robot having an end effector, and a processing chamber containing the pedestal assembly and light sensor. The method includes the steps of producing light within the processing chamber, moving the end effector over the optical input such that amount of light reaching the light sensor varies in relation to the position of the end effector, and recording the signal gain as the end effector is moved over the optical input. The method also includes the step of establishing from the recorded signal gain a desired position of the end effector relative to the pedestal assembly.