The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 17, 2012
Filed:
Oct. 08, 2007
Jacek Baborowski, Lussery Villars, PL;
Claude Bourgeois, Bole, CH;
Marc-alexandre Dubois, Apples, CH;
David Ruffieux, Lugnorre, CH;
Jacek Baborowski, Lussery Villars, PL;
Claude Bourgeois, Bole, CH;
Marc-Alexandre Dubois, Apples, CH;
David Ruffieux, Lugnorre, CH;
Abstract
The invention relates to a silicon resonator () of the tuning-fork type in which the linear frequency drift depending on the temperature is compensated. The resonator includes a silicon base (), a plurality of parallel arms () capable of vibrating and actuator (), wherein the arms include a silicon layer provided between two layers of silicon oxide having a thickness, relative to that of the silicon layer, such that it ensures the first-order compensation of the resonator thermal drift.