The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 17, 2012
Filed:
Dec. 11, 2009
Fumio Ohtomo, Tokyo-to, JP;
Hisashi Isozaki, Tokyo-to, JP;
Fumio Ohtomo, Tokyo-to, JP;
Hisashi Isozaki, Tokyo-to, JP;
Kabushiki Kaisha TOPCON, Tokyo-to, JP;
Abstract
The present invention provides an electron microscope devicecomprising a scanning electron microscopeand an optical microscopewherein the scanning electron microscope has scanning meansfor scanning an electron beam and an electron detectorfor detecting electrons issued from a specimenscanned by the electron beam, and the scanning electron microscope acquires a scanning electron image based on a detection result from the electron detector, wherein the optical microscope projects an illumination light to the specimen, receives a reflection light from the specimen and acquires an optical image, and wherein an optical axisof the scanning electron microscope crosses an optical axisof the optical microscope at a point of observation of the specimen, wherein the scanning means projects the electron beam for scanning with a scanning width wider than a width of a scanning area, the optical microscope projects an illumination light and acquires an optical image in an overrunning portion where the electron beam is projected beyond the scanning area, and the scanning electron microscope acquires a scanning electron image based on electrons issued when the electron beam scans over the scanning area.