The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 17, 2012

Filed:

Oct. 15, 2008
Applicants:

Robertus T. F. Van Schaijk, Eindhoven, NL;

Piebe Anne Zijlstra, Middelaar, NL;

Ronald Koster, Wijchen, NL;

Pieter Simon Van Dijk, Renkum, NL;

Inventors:

Robertus T. F. Van Schaijk, Eindhoven, NL;

Piebe Anne Zijlstra, Middelaar, NL;

Ronald Koster, Wijchen, NL;

Pieter Simon Van Dijk, Renkum, NL;

Assignee:

Epcos AG, Munich, DE;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

Method for manufacturing a capacitor on a substrate, the capacitor including a first electrode () and a second electrode (), the first and second electrodes being separated by a cavity (), the substrate including an insulating surface layer (), the first electrode () being arranged on the insulating surface layer a first metal body () being adjacent to the first electrode and arranged as anchor of the second electrode () the second electrode being arranged as a beam-shaped body () located on the first metal body and above the first electrode; the cavity () being laterally demarcated by a sidewall of the first metal body.


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