The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 17, 2012
Filed:
Jan. 28, 2011
Mark R. Erickson, Newbury Park, CA (US);
Aaron L. Dingus, Moorpark, CA (US);
Arthur W. Custer, Iii, Ventura, CA (US);
Henry J. Poole, Ventura, CA (US);
Nader Jamshidi, Newbury Park, CA (US);
Mark R. Erickson, Newbury Park, CA (US);
Aaron L. Dingus, Moorpark, CA (US);
Arthur W. Custer, III, Ventura, CA (US);
Henry J. Poole, Ventura, CA (US);
Nader Jamshidi, Newbury Park, CA (US);
Poole Ventura, Inc., Oxnard, CA (US);
Abstract
A frame supporting a containment chamber, the containment chamber is preferably configured to enclose and confine a process chamber. A heat source module is disposed between the containment chamber and the process chamber, while a thermal regulation cavity is maintained between the heat source module and the process chamber. Preferably, at least one fluid inlet box is in fluidic communication with the thermal regulation cavity, in which the fluid inlet box provides a plate valve that mitigates the flow of fluids from the thermal regulation cavity through the fluid inlet box and to an environment external to the thermal regulation cavity. Additionally, the preferred fluid inlet box further includes a flow adjustment structure interacting with the plate valve to control fluid flow from the environment external to the thermal regulation cavity past the plate valve and into thermal regulation cavity.