The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 10, 2012
Filed:
Feb. 04, 2008
Fabio Marioni, Saronno, IT;
Fabio Marioni, Saronno, IT;
Media Lario S.r.l., Boslsio Parini, IT;
Abstract
An alignment tool for use in calibrating an optical bench and/or alignment of an optical system such as a collector optical system for EUV and X-ray applications is disclosed. The optical system includes multiple nested mirrors attached to a mechanical support. The tool includes a mechanical interface plate, a lower reference ring, an upper reference ring and a pinhole member disposed spaced apart axially in sequence; a first positioning device attached to the mechanical interface plate and to the lower reference ring; the first positioning device being adapted for precisely adjusting the position of the lower reference ring in two dimensions; a second positioning device attached to the mechanical interface plate and to the upper reference ring and adapted for precisely adjusting the position of the upper reference ring in two dimensions; a third positioning device attached to the upper reference plate and to the pinhole member and adapted for precisely adjusting the position of the pinhole member in three dimensions; a mechanical interface mounted on or integral with the mechanical interface plate and being substantially identical in form to that of the mechanical support of the optical system.