Spectrometric analyzing device and spectrometric analyzing method

Abstract

A spectrometric analyzing device is capable of analyzing a thin film with high accuracy by using light having an arbitrary wavelength, such as not only infrared light but also visible light, ultraviolet light and X-ray, and using whatever refractive index of a supporting member of the thin film. A spectrometric analyzing device comprises a light source (), a polarizing filter (), a detection unit (), a regression operation unit () and an absorbance spectrum calculation unit (). The light source () emits light at n different angles of incidence (θ) to a measurement portion. The polarizing filter () shields an s-polarized component. The detection unit () detects transmitted spectra (S). The regression operation unit () uses the transmitted spectra (S) and a mixing ratio (R) to obtain an in-plane mode spectrum (s) and an out-of-plane mode spectrum (s) through a regression analysis. The absorbance spectrum calculation unit () calculates an in-plane mode absorbance spectrum (A) and an out-of-plane mode absorbance spectrum (A) of the thin film, based on the results from a state in which the thin film is on the supporting member and a state in which no thin film is on the supporting member.