The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 10, 2012
Filed:
Sep. 29, 2006
Manfred Engelhardt, Feldkirchen-Westerham, DE;
Andreas Stich, Gruenwald, DE;
Guenther Schindler, Munich, DE;
Michael Schrenk, Diessen am Ammersee, DE;
Manfred Engelhardt, Feldkirchen-Westerham, DE;
Andreas Stich, Gruenwald, DE;
Guenther Schindler, Munich, DE;
Michael Schrenk, Diessen am Ammersee, DE;
Infineon Technologies AG, Neubiberg, DE;
Abstract
An MIM capacitor includes a first capacitor electrode, which is formed in the surface of a first intermediate dielectric, a second intermediate dielectric, which is formed on the first intermediate dielectric and has an opening that exposes the first capacitor electrode, and a first electrically conducting diffusion barrier layer, which is formed on the surface of the exposed first capacitor electrode. On the diffusion barrier layer and on the side walls of the opening there is also formed a capacitor dielectric and a second capacitor electrode on top.