The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 03, 2012
Filed:
May. 17, 2005
Applicants:
Atsushi Ootake, Saitama, JP;
Tadashi Nakamura, Yokohama, JP;
Inventors:
Atsushi Ootake, Saitama, JP;
Tadashi Nakamura, Yokohama, JP;
Assignee:
Mitsubishi Rayon Co., Ltd., Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
C08F 20/18 (2006.01); C08F 20/68 (2006.01); G03F 7/004 (2006.01); G03F 7/039 (2006.01);
U.S. Cl.
CPC ...
Abstract
A polymer contains a constituent unit having a specific acetal skeleton. This polymer is able to be used as a resist resin in DUV excimer laser lithography, electron beam lithography, EUV lithography, or the like.