The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 03, 2012
Filed:
Oct. 04, 2006
Yoshimichi Shiki, Kumamoto, JP;
Seiji Oda, Kagoshima, JP;
Hayato Iwamoto, Kanagawa, JP;
Yoshiya Hagimoto, Kanagawa, JP;
Yoshimichi Shiki, Kumamoto, JP;
Seiji Oda, Kagoshima, JP;
Hayato Iwamoto, Kanagawa, JP;
Yoshiya Hagimoto, Kanagawa, JP;
Sony Corporation, Tokyo, JP;
Abstract
There is provided a substrate treatment method for performing treatment by feeding a chemical liquid to a surface of a substrate, in which, before feeding the chemical liquid to a predetermined area of the substrate, a liquid substance having a resistivity lower than that of the chemical liquid is fed to the surface of the substrate so that the liquid substance wets at least the predetermined area, and then, the chemical liquid is fed to the predetermined area so that the treatment is performed on the substrate with the chemical liquid fed to the surface of the substrate.