The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 27, 2011
Filed:
Nov. 28, 2007
Applicant:
Gerhard Zaehringer, Freiburg, DE;
Inventor:
Gerhard Zaehringer, Freiburg, DE;
Assignee:
HUETTINGER Elektronik GmbH + Co. KG, Freiburg, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 31/12 (2006.01);
U.S. Cl.
CPC ...
Abstract
To detect arc discharges occurring in a plasma, a parameter of the plasma process is determined, and after a first period of time following the detection of an arc discharge the parameter is again determined. In the event that after the first period of time no arc discharge is detected, a first arc suppression countermeasure for suppression of arc discharges is executed.