The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 27, 2011
Filed:
Feb. 14, 2008
Applicants:
Markus Hanika, Landsberg, DE;
Tobias Stolley, Frankfurt, DE;
Inventors:
Markus Hanika, Landsberg, DE;
Tobias Stolley, Frankfurt, DE;
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 14/36 (2006.01);
U.S. Cl.
CPC ...
Abstract
This invention relates to an apparatus () for treating, e.g. coating, a substrate () in a vacuum chamber (). In this vacuum chamber () there are arranged n cathodes (-) and n+1 anodes (-), each of said anodes adjacent to a cathode (-). Each of the n cathodes (-) and n of the assigned anodes (-) are connected to a power supply (-). One of the anodes () not being assigned to a cathode (-) is connected to an electrical line () which is connecting each of the anodes (-). A pull-down resistor () is connected to said line () at its one end and to ground () at its other end.