The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 27, 2011
Filed:
May. 30, 2008
Stefan Bangert, Steinau, DE;
Jose Manuel Dieguez-campo, Hanau, DE;
Michael Koenig, Frankfurt, DE;
Nety M. Krishna, Sunnyvale, CA (US);
Byung-sung Leo Kwak, Portland, OR (US);
Stefan Bangert, Steinau, DE;
Jose Manuel Dieguez-Campo, Hanau, DE;
Michael Koenig, Frankfurt, DE;
Nety M. Krishna, Sunnyvale, CA (US);
Byung-Sung Leo Kwak, Portland, OR (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
The invention relates to a cleaning method in which from a vacuum coating chamber () of a coating installation () for the coating of substrates () with alkali- or alkaline earth-metals, residues of alkali- or alkaline earth-metals are removed. For this purpose into the chamber () a gas from the group of N, Oor air is introduced, which reacts with the alkali- or alkaline earth-metals to form the corresponding solid compounds. Water can additionally be introduced into the vacuum coating chamber (). After the alkali- or alkaline earth-metals have reacted with the gas, the corresponding solid compound is removed from the vacuum coating chamber.