The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 27, 2011
Filed:
Jan. 07, 2008
Applicants:
Koji Kitahara, Ina, JP;
Motoki Itoda, Suwa, JP;
Masahiro Fujii, Shiojiri, JP;
Yoshifumi Hano, Suwa, JP;
Inventors:
Koji Kitahara, Ina, JP;
Motoki Itoda, Suwa, JP;
Masahiro Fujii, Shiojiri, JP;
Yoshifumi Hano, Suwa, JP;
Assignee:
Seiko Epson Corporation, , JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B41J 2/045 (2006.01);
U.S. Cl.
CPC ...
Abstract
An electrostatic actuator comprises: a fixed electrode formed on a substrate; a movable electrode placed at an position opposing the fixed electrode via a predetermined gap; a driving unit giving the movable electrode a displacement by generating an electrostatic force between the fixed electrode and the movable electrode: and an insulation film made of HfAlOformed on an opposing surface of at least one of the fixed electrode and the movable electrode.