The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 27, 2011

Filed:

Jan. 28, 2009
Applicant:

Michael B. Doelle, Mountain View, CA (US);

Inventor:

Michael B. Doelle, Mountain View, CA (US);

Assignee:

Silicon Microstructures, Inc., Mountain View, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01L 19/04 (2006.01);
U.S. Cl.
CPC ...
Abstract

Circuits, methods, and systems to compensate pressure sensor readings for changes in temperature. An example measures temperature in a field-effect-transistor-based pressure sensor or micro-electromechanical system by measuring the device's threshold voltage. This threshold voltage is linearly dependent on the temperature but shows negligible sensitivity to mechanical stress. This allows the pressure sensor's temperature to be determined in an environment of changing pressure. Once the temperature is known, the pressure sensor's pressure readings can be adjusted. The threshold voltage can be extracted by measuring the turn-on transistor characteristic of the device and using device models. Alternately, the threshold voltage can be extracted using threshold voltage extraction circuits.


Find Patent Forward Citations

Loading…