The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 27, 2011
Filed:
Dec. 20, 2005
Johannes Schuster, Constance, DE;
Johannes Schuster, Constance, DE;
Kulicke & Soffa Die Bonding GmbH, Berg, CH;
Abstract
An apparatus () for fixing a planar object, in particular a substrate (), on a working area () by means of vacuum is provided with an at least partly transparent bearing plate (), one side of which forms the working area and which has a rear side arranged at a distance from the working area with a radiation-reflecting structure (). The bearing plate additionally has vacuum channels which can be connected to a vacuum line and which open into the working area. In order to illuminate the substrate as homogeneously as possible by means of transmitted light, at least one light source () is provided, the radiation of which can be fed into the bearing plate. In addition, the working area is preferably operatively connected to a heating apparatus (), so that the substrate () can be heated.