The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 20, 2011
Filed:
Dec. 22, 2008
Dirk Hauschild, Köln, DE;
Manfred Jarczynski, Recklinghausen, DE;
Thomas Mitra, Düsseldorf, DE;
LIMO Patentverwaltung GmbH & Co. KG, Gerstengrund, DE;
Abstract
Device for illuminating an area, in particular for illuminating a mask (), for example for a lithographic application, with at least one light source () for producing light () that can be used for the illumination, optics means () for shaping the light () produced by the at least one light source (), and separation means (″) capable of dividing the light () to be used for the illumination into several mutually separated partial beams (), so that these partial beams () can illuminate the area to be illuminated with a spacing therebetween. The present invention also relates to a device for applying light to a work area.