The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 20, 2011
Filed:
Jul. 31, 2008
Applicants:
Masahiro Terada, Hadano, JP;
Makoto Kojima, Atsugi, JP;
Takashi Iwaki, Machida, JP;
Takeru Mizue, Atsugi, JP;
Tsuyoshi Ibe, Fujisawa, JP;
Inventors:
Masahiro Terada, Hadano, JP;
Makoto Kojima, Atsugi, JP;
Takashi Iwaki, Machida, JP;
Takeru Mizue, Atsugi, JP;
Tsuyoshi Ibe, Fujisawa, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 1/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A conductive film of thickness of from 3 nm to 50 nm made from a metal or ally formed on a substrate, wherein the ratio of density thereof to bulk density of the metal or alloy is from 0.2 to 0.5, and the ratio of resistivity thereof to bulk resistivity of the metal or alloy is from 100 to 100000.