The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 20, 2011
Filed:
Apr. 19, 2007
David Garmire, Berkeley, CA (US);
Hyuck Choo, Albany, CA (US);
Richard S. Muller, Kensington, CA (US);
James Demmel, Berkeley, CA (US);
Sanjay Govindjee, Staefa, CH;
David Garmire, Berkeley, CA (US);
Hyuck Choo, Albany, CA (US);
Richard S. Muller, Kensington, CA (US);
James Demmel, Berkeley, CA (US);
Sanjay Govindjee, Staefa, CH;
The Regents of the University of California, Oakland, CA (US);
Abstract
The present invention provides a device for in-situ monitoring of material, process and dynamic properties of a MEMS device. The monitoring device includes a pair of comb drives, a cantilever suspension comprising a translating shuttle operatively connected with the pair of comb drives, structures for applying an electrical potential to the comb drives to displace the shuttle, structures for measuring an electrical potential from the pair of comb drives; measuring combs configured to measure the displacement of the shuttle, and structures for measuring an electrical capacitance of the measuring combs. Each of the comb drives may have differently sized comb finger gaps and a different number of comb finger gaps. The shuttle may be formed on two cantilevers perpendicularly disposed with the shuttle, whereby the cantilevers act as springs to return the shuttle to its initial position after each displacement.