The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 13, 2011
Filed:
Jun. 07, 2006
Guenther Hans Derra, Aachen, DE;
Thomas Kruecken, Aachen, DE;
Christof Metzmacher, Aachen, DE;
Achim Weber, Aachen, DE;
Peter Zink, Aachen, DE;
Guenther Hans Derra, Aachen, DE;
Thomas Kruecken, Aachen, DE;
Christof Metzmacher, Aachen, DE;
Achim Weber, Aachen, DE;
Peter Zink, Aachen, DE;
Koninklijke Philips Electronics N.V., Eindhoven, NL;
Abstract
The present invention provides a method of cleaning optical surfaces in an irradiation unit in order to remove contaminations deposited on said optical surfaces. The method includes a cleaning step in which a first gas or gas mixture is brought into contact with said optical surfaces thereby forming a volatile compound with a first portion of said contaminations. In an operation pause of the irradiation unit prior to the cleaning step, a pretreatment step is performed, in which a second gas or gas mixture is brought into contact with said optical surfaces. Said second gas or gas mixture is selected to react with a second portion of said contaminations different from said first portion to form a reaction product, which is able to form a volatile compound with said first gas or gas mixture.