The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 13, 2011
Filed:
Oct. 14, 2009
Young Jong Lee, Sungnam-shi, KR;
Jun Young Choi, Seoul, KR;
Hyoung-kyu Son, Gangbuk-gu, KR;
Jeong-bin Lee, Yongin, KR;
Gyeong-hoon Kim, Anyang-shi, KR;
Hyung-soo Kim, Seoul, KR;
Myung-woo Han, Seoul, KR;
Young Jong Lee, Sungnam-shi, KR;
Jun Young Choi, Seoul, KR;
Hyoung-Kyu Son, Gangbuk-gu, KR;
Jeong-Bin Lee, Yongin, KR;
Gyeong-Hoon Kim, Anyang-shi, KR;
Hyung-Soo Kim, Seoul, KR;
Myung-Woo Han, Seoul, KR;
Advanced Display Process Engineering Co. Ltd., Sungnam-shi, KR;
Abstract
Disclosed herein is a vacuum processing apparatus for performing a desired process for a substrate after establishing a vacuum atmosphere therein. More particularly, the vacuum processing apparatus includes a vacuum chamber, which is divided into a chamber body and an upper cover. The upper cover is configured to be easily opened away from and closed to the chamber body.