The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 06, 2011
Filed:
Jun. 17, 2009
Lian Ser Koh, Singapore, SG;
Choon Meng Chua, Singapore, SG;
Wah Pheng Chua, Singapore, SG;
Chee Hong Jacob Phang, Singapore, SG;
Soon Huat Tan, Singapore, SG;
Lian Ser Koh, Singapore, SG;
Choon Meng Chua, Singapore, SG;
Wah Pheng Chua, Singapore, SG;
Chee Hong Jacob Phang, Singapore, SG;
Soon Huat Tan, Singapore, SG;
Semicaps Pte Ltd, Singapore, SG;
Abstract
A solid immersion lens optics assembly, a test station for probing and testing of integrated circuits on a semiconductor wafer, and a method of landing a SIL on an object. The optics assembly comprises an objective lens housing for receiving an objective lens, and a solid immersion lens (SIL) housing for mounting an SIL and adapted for connection to the objective lens housing; wherein a peripheral wall of the SIL housing comprises an integrated spring section adapted to provide a biased support for the SIL.