The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 06, 2011
Filed:
May. 26, 2010
Wei MA, Hong Kong, HK;
Francis Chee-shuen Lee, Hong Kong, HK;
Ho Yin Chan, Hong Kong, HK;
Hong Kong Applied Science & Technology Research Institute, Ltd., Hong Kong, HK;
Abstract
A biaxial micro-electromechanical (MEMS) device is disclosed. The device includes a gimbal rotatable about a gimbal axis of rotation. A pair of gimbal torsion bars connects the gimbal to a support along the gimbal rotation axis. A mirror plate is rotatable about a mirror axis of rotation, the mirror plate rotation axis being substantially perpendicular to the gimbal rotation axis. A pair of mirror plate torsion bars connects the mirror plate to the gimbal along the mirror plate axis of rotation. One or more gimbal moment-of-inertia-altering blocks are positioned on a surface of the mirror plate away from the gimbal axis of rotation. Additionally, one or more mirror plate moment-of-inertia-altering blocks are positioned on a surface of the mirror plate away from the mirror plate rotation axis such that the distance from the mirror plate axis determines a resonant frequency of the biaxial MEMS device.