The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 06, 2011
Filed:
Nov. 11, 2009
Yasushi Hara, Ichinomiya, JP;
Tetsuya Maeda, Konan, JP;
Akifumi Tosa, Komaki, JP;
Takenori Sawamura, Nagoya, JP;
Yasushi Hara, Ichinomiya, JP;
Tetsuya Maeda, Konan, JP;
Akifumi Tosa, Komaki, JP;
Takenori Sawamura, Nagoya, JP;
NGK Spark Plug Co., Ltd., Aichi, JP;
Abstract
A silicon nitride-melilite composite sintered body in accordance with the invention includes silicon nitride and a melilite MeSiON, where Me denotes a metal element combining with silicon nitride to generate the melilite. The silicon nitride-melilite composite sintered body contains Si in a range of 41 to 83 mole percent in SiNequivalent and Me in a range of 13 to 50 mole percent in oxide equivalent. The silicon nitride-melilite composite sintered body has an average thermal expansion coefficient that is arbitrarily adjustable in a range of 2 to 6 ppm/K at temperatures of 23 to 150° C. The silicon nitride-melilite composite sintered body has a high Young's modulus, a high mechanical strength, and excellent sintering performance. A device used for inspection of semiconductor in accordance with the invention utilizes such a silicon nitride-melilite composite sintered body.