The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 29, 2011
Filed:
Aug. 07, 2008
Masanori Takahashi, Kanagawa-ken, JP;
Satoshi Tanaka, Kanagawa-ken, JP;
Masanori Takahashi, Kanagawa-ken, JP;
Satoshi Tanaka, Kanagawa-ken, JP;
Kabushiki Kaisha Toshiba, Tokyo, JP;
Abstract
The intensity distribution of an optical image in a resist film is calculated (S); the intensity distribution of the optical image is transformed through a Fourier transform in a periodic direction of the intensity distribution of the optical image (S) and is transformed through a spectral transform in an aperiodic direction of the intensity distribution of the optical image by use of a base which satisfies a boundary condition (S); a modulation function for modulating the intensity distribution of the optical image is transformed through a Fourier transform in the periodic direction (S) and is transformed through a spectral transform in the aperiodic direction by use of the base satisfying the boundary direction (S); a product of the post-transformed intensity distribution of the optical image and the post-transformed modulation function is computed (S), is transformed through an inverse Fourier transform in the periodic direction (S), and is transformed through an inverse spectral transform in the aperiodic direction by use of a base corresponding to the inverse transform of the spectral transform; and thereby a modulated intensity distribution of the optical image is calculated (S).