Power supply regulating apparatus, semiconductor manufacturing apparatus, method for controlling power to heater, and method for manufacturing semiconductor device

Abstract

A supplying power adjusting apparatus has excellent temperature response and excellent stabilities to power supply change and load change. The apparatus is provided with a semiconductor inverter for high-speed switching power control, which converts a direct current rectified by a rectifying circuit () into alternating current power in response to a control signal and supplies a heater () with the power; a temperature change detecting circuit () for detecting the temperature change of the heater (); a power supply change detecting circuit () for detecting the power change of the rectifying circuit (); a load change detecting circuit () for detecting the change of the alternating current power supplied to the heater (); and a power control signal generating circuit () which calculates a power quantity to be supplied to the heater () and controls the frequency or duty ratio of a control signal to be added to the power controlling semiconductor inverter in response to the calculated results.