The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 22, 2011
Filed:
Oct. 30, 2009
Yoshihiro Maeda, Tokyo, JP;
Hirotoshi Ichikawa, Tokyo, JP;
Naoya Sugimoto, Tokyo, JP;
Fusao Ishii, Pittsburgh, PA (US);
Yoshihiro Maeda, Tokyo, JP;
Hirotoshi Ichikawa, Tokyo, JP;
Naoya Sugimoto, Tokyo, JP;
Fusao Ishii, Pittsburgh, PA (US);
Silicon Quest Kabushiki-Kaisha, , JP;
Olympus Corporation, , JP;
Abstract
The present invention provides an image display system implemented with a micro-electromechanical system (MEMS) device formed and supported on a substrate functioning as a spatial light modulator wherein the MEMS device further comprises a drive circuit disposed on the substrate; a micromirror functioning as a movable electrode supported on a deflectable hinge extended from the substrate; a stationary electrode disposed on the substrate and connected to the drive circuit to receive signals therefrom, wherein the stationary electrode comprises a first electrode, a second electrode and an insulation layer, wherein the insulation layer is disposed between the first electrode and second electrode.