The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 22, 2011
Filed:
Mar. 02, 2009
Mitsuhiro Hata, Toyonaka, JP;
Yusuke Fuji, Ibaraki, JP;
Takayuki Miyagawa, Toyonaka, JP;
Sumitomo Chemical Company, Limited, Tokyo, JP;
Abstract
A chemically amplified resist composition, comprising: a resin which includes a structural unit having an acid-labile group in a side chain, a structural unit represented by the formula (I) and a structural unit having a polycyclic lactone structure, and which is soluble in an organic solvent and insoluble or poorly soluble in an alkali aqueous solution but rendered soluble in an alkali aqueous solution by the action of an acid; and an acid generator represented by the formula (II). wherein Xrepresents a hydrogen atom, a Cto Calkyl group, etc., Y in each occurrence independently represent a hydrogen atom or an alkyl group, and n is an integer of 1 to 14, Rto Rindependently represent a hydrogen atom, an alkyl group, etc., and Arepresents an organic counterion, Erepresents CFSO—, CFSO—, CFSO—, etc., Yand Yindependently represent a fluorine atom or a Cto Cperfluoroalkyl group.