The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 15, 2011
Filed:
Jan. 31, 2008
Lance K. Fisher, Excelsior, MN (US);
Paul R. Haugen, Bloomington, MN (US);
Lance K. Fisher, Excelsior, MN (US);
Paul R. Haugen, Bloomington, MN (US);
CyberOptics Corporation, Golden Valley, MN (US);
Abstract
A method for mapping height of a feature upon a test surface is provided. The method includes projecting patterned illumination upon the feature, the patterned illumination having a plurality of distinct fringe periods. A first image of the feature is acquired while the patterned illumination is projected upon the feature. Relative movement is then generated between a sensor and the feature to cause relative displacement of a fraction of a field of view of a detector, the fraction being equal to about an inverse of the number of distinct regions of a reticle generating the pattern. Then, a second image of the feature is acquired while the patterned illumination is projected upon the feature. The height map is generated based, at least, upon the first and second images.