The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 15, 2011
Filed:
Dec. 18, 2006
Applicants:
Jozef T. M. Van Beek, Rosmalen, NL;
Bart Van Velzen, Arnhem, NL;
Inventors:
Jozef T. M. Van Beek, Rosmalen, NL;
Bart Van Velzen, Arnhem, NL;
Assignee:
NXP B.V., Eindhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 9/24 (2006.01); H03H 9/125 (2006.01); H03H 3/007 (2006.01); H03B 5/30 (2006.01);
U.S. Cl.
CPC ...
Abstract
The invention relates to a MEMS resonator comprising a first electrode, a movable element () comprising a second electrode, the movable element () at least being movable towards the first electrode, the first electrode and the movable element () being separated by a gap () having sidewalls. According to the invention, the MEMS resonator is characterized in that the gap () has been provided with a dielectric layer () on at least one of the sidewalls.