The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 15, 2011
Filed:
Oct. 16, 2009
Applicants:
Kazufumi Suenaga, Tsuchiura, JP;
Kenji Shibata, Tsukuba, JP;
Fumihito Oka, Hitachi, JP;
Hideki Sato, Hamamatsu, JP;
Inventors:
Kazufumi Suenaga, Tsuchiura, JP;
Kenji Shibata, Tsukuba, JP;
Fumihito Oka, Hitachi, JP;
Hideki Sato, Hamamatsu, JP;
Assignee:
Hitachi Cable, Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/187 (2006.01);
U.S. Cl.
CPC ...
Abstract
A piezoelectric thin film element includes a bottom electrode, a piezoelectric layer and a top electrode on a substrate. The piezoelectric layer includes as a main phase a perovskite-type oxide represented by (NaKLi)NbO(0≦x≦1, 0≦y≦1, 0≦z≦0.2, x+y+z=1), and the bottom electrode includes a surface roughness of not more than 0.86 nm in arithmetic mean roughness Ra or not more than 1.1 nm in root mean square roughness Rms.