The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 15, 2011
Filed:
Aug. 16, 2010
Masashi Numata, Chiba, JP;
Kiyoshi Aratake, Chiba, JP;
Masashi Numata, Chiba, JP;
Kiyoshi Aratake, Chiba, JP;
Seiko Instruments Inc., , JP;
Abstract
There is provided a piezoelectric vibratorthat includes a base substrate, a lid substrate, a piezoelectric vibrating reed, a pair of external electrodesand, a pair of through electrodesand, and routing electrodesand. The lid substrateincludes a recessfor a cavity and is bonded to the base substrate so that the recess faces the base substrate. The piezoelectric vibrating reedis bonded to the upper surface of the base substrate in a cavity that is formed between both the substrates. The pair of external electrodesandis formed on the lower surface of the base substrate. The pair of through electrodesandis formed so as to pass through the base substrate and is electrically connected to the pair of external electrodes, respectively. The routing electrodesandare formed on the upper surface of the base substrate and electrically connect the pair of through electrodes to the piezoelectric vibrating reed. The through electrodes include electrode filmsandthat are formed on the inner surfaces of the through holesand, and glass bodiesandthat are fixed to the inner surfaces of the through holes with the electrode films interposed therebetween so as to close the through holes.