The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 15, 2011
Filed:
Jul. 31, 2007
Applicants:
Gregory Herman, Albany, OR (US);
Randy Hoffman, Corvallis, OR (US);
Tsuyoshi Yamashita, Corvallis, OR (US);
J. Daniel Smith, Corvallis, OR (US);
Inventors:
Gregory Herman, Albany, OR (US);
Randy Hoffman, Corvallis, OR (US);
Tsuyoshi Yamashita, Corvallis, OR (US);
J. Daniel Smith, Corvallis, OR (US);
Assignee:
Hewlett Packard Development Company, L.P., Houston, TX (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A thin film transistor is manufactured by a process including forming an oxide semiconductor channel, patterning the oxide semiconductor channel with a photolithographic process, and exposing the patterned oxide semiconductor channel to an oxygen containing plasma.