The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 15, 2011
Filed:
Feb. 24, 2009
Shiro Yazaki, Chino, JP;
Setsuya Iwashita, Nirasaki, JP;
Eiju Hirai, Fujimi-machi, JP;
Tsutomu Nishiwaki, Azumino, JP;
Shiro Yazaki, Chino, JP;
Setsuya Iwashita, Nirasaki, JP;
Eiju Hirai, Fujimi-machi, JP;
Tsutomu Nishiwaki, Azumino, JP;
Seiko Epson Corporation, Tokyo, JP;
Abstract
A method of manufacturing a liquid jet head includes depositing a lower electrode film on a passage forming substrate and patterning the lower electrode film into a predetermined pattern, forming a piezoelectric layer on the passage forming substrate, forming an intermediate film made of a conductive material on the piezoelectric layer, forming a protective film on the intermediate film and, using the protective film as a mask, patterning by etching the piezoelectric layer together with the intermediate film into a predetermined pattern, peeling off the protective film, and depositing an upper electrode film on the passage forming substrate and patterning the upper electrode film into a predetermined pattern.