The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 15, 2011
Filed:
May. 30, 2008
Andrew C. Mcneil, Chandler, AZ (US);
Aaron A. Geisberger, Phoenix, AZ (US);
Daniel N. Koury, Jr., Mesa, AZ (US);
Gary G. LI, Gilbert, AZ (US);
Andrew C. McNeil, Chandler, AZ (US);
Aaron A. Geisberger, Phoenix, AZ (US);
Daniel N. Koury, Jr., Mesa, AZ (US);
Gary G. Li, Gilbert, AZ (US);
Freescale Semiconductor, Inc., Austin, TX (US);
Abstract
A microelectromechanical systems (MEMS) sensor () includes a substrate () a movable element () spaced apart from the substrate (), suspension anchors () formed on the substrate (), and compliant members () interconnecting the movable element () with the suspension anchors. The MEMS sensor () further includes fixed fingers () and fixed finger anchors () attaching the fixed fingers () to the substrate (). The movable element () includes openings (). At least one of the suspension anchors resides in at least one of the multiple openings () and pairs () of the fixed fingers () reside in other multiple openings (). The MEMS sensor () is symmetrically formed, and a location of the fixed finger anchors () defines an anchor region () within which the suspension anchors () are positioned.