The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 08, 2011
Filed:
Jun. 04, 2009
Tomoyuki Terashima, Tokyo, JP;
Hirokazu Uchida, Saitama, JP;
Tomoyuki Terashima, Tokyo, JP;
Hirokazu Uchida, Saitama, JP;
Oki Semiconductor Co., Ltd., Tokyo, JP;
Abstract
To provide a semiconductor substrate whose columnar member for alignment is difficult to fall off and a manufacturing method thereof. An alignment mark(columnar member for alignment) and protection postssurrounding the alignment markto protect the alignment mark are disposed in an alignment mark forming regionof a semiconductor wafer(semiconductor substrate). Each of the protection posts has a diameter (maximum diameter) of, for example, 0.6 μm. The protection postsare arranged such that the diameter of each of the columnar protection postsis greater than a diameter (for example, 0.2 μm) of the alignment mark. That is, the protection postsare arranged such that the contact area between each of the protection postsand an underlayer thereof (dummy wire layer) is greater than the contact area between the alignment markand an underlayer thereof (dummy wire layer).