The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 08, 2011
Filed:
Aug. 01, 2007
Bradley D. Sucher, Murphy, TX (US);
Christopher S. Whitesell, Garland, TX (US);
Joshua J. Hubregsen, Dallas, TX (US);
James H. Beatty, Rockwall, TX (US);
Bradley D. Sucher, Murphy, TX (US);
Christopher S. Whitesell, Garland, TX (US);
Joshua J. Hubregsen, Dallas, TX (US);
James H. Beatty, Rockwall, TX (US);
Texas Instruments Incorporated, Dallas, TX (US);
Abstract
In one aspect provides a method of manufacturing a semiconductor device having improved transistor performance. In one aspect, this improvement is achieved by conducting a pre-deposition spacer deposition process wherein a temperature of a bottom region of a furnace is higher than a temperature of in the top region and is maintained for a predetermined period. The pre-deposition temperature is changed to a deposition temperature, wherein a temperature of the bottom region is lower than a temperature of the top region.