The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 08, 2011

Filed:

Sep. 18, 2007
Applicants:

Tsun-neng Yang, Taipei, TW;

Shan-ming Lan, Taoyuan County, TW;

Chin-chen Chiang, Taoyuan County, TW;

Wei-yang MA, Banqiao, TW;

Chien-te Ku, Pingzhen, TW;

Yu-hsiang Huang, Pingzhen, TW;

Inventors:

Tsun-Neng Yang, Taipei, TW;

Shan-Ming Lan, Taoyuan County, TW;

Chin-Chen Chiang, Taoyuan County, TW;

Wei-Yang Ma, Banqiao, TW;

Chien-Te Ku, Pingzhen, TW;

Yu-Hsiang Huang, Pingzhen, TW;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/30 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method is disclosed for making a titanium-based compound film of a poly-silicon solar cell. In the method, a ceramic substrate is made of aluminum oxide. The ceramic substrate is coated with a titanium film in an e-gun evaporation system. Dichlorosilane is provided on the titanium film by atmospheric pressure chemical vapor deposition. A titanium-based compound film is formed on the ceramic substrate.


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