The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 08, 2011
Filed:
Jul. 10, 2007
IL Wun Shim, Seoul, KR;
Seung Soo Lee, Seoul, KR;
Kook Won Seo, Seoul, KR;
Jong Pil Park, Seongnam-si, KR;
Il Wun Shim, Seoul, KR;
Seung Soo Lee, Seoul, KR;
Kook Won Seo, Seoul, KR;
Jong Pil Park, Seongnam-si, KR;
Samsung SDI Co., Ltd., Yongin-si, KR;
Samsung Electronics Co., Ltd., Suwon-si, KR;
Seoul National University Industry Foundation, Seoul, KR;
Chung-Ang University Industry-Academy Cooperation Foundation, Seoul, KR;
Abstract
Disclosed is a method for fabricating a CuInSthin film by metal-organic chemical vapor deposition (MOCVD). The method comprises fabricating a copper thin film by depositing an asymmetric copper precursor on a substrate by MOCVD and fabricating a CuInSthin film by depositing an indium-sulfur-containing precursor on the copper thin film by MOCVD. The method enables fabrication of a CuInSthin film with a constant composition even under vacuum as well as an argon (Ar) atmosphere. Disclosed is further a CuInSthin film fabricated by the method. Disclosed is further a method for fabricating an InSthin film for a window of a solar cell via deposition of an indium-sulfur-containing precursor on the CuInSthin film by MOCVD. Disclosed further is an InSthin film fabricated by the method. The InSthin film is useful for a substitute for CdS conventionally used for windows of solar cells and contributes to simplification in fabrication process of solar cells.