The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 01, 2011
Filed:
Jul. 26, 2007
Yoshio Yamada, Nagano, JP;
Hiroshi Nakayama, Nagano, JP;
Mitsuhiro Nagaya, Nagano, JP;
Tsuyoshi Inuma, Nagano, JP;
Takashi Akao, Nagano, JP;
Yoshio Yamada, Nagano, JP;
Hiroshi Nakayama, Nagano, JP;
Mitsuhiro Nagaya, Nagano, JP;
Tsuyoshi Inuma, Nagano, JP;
Takashi Akao, Nagano, JP;
NHK Spring Co., Ltd., Yokohama-shi, JP;
Abstract
A parallelism adjusting mechanism of a probe card is provided. The parallelism adjusting mechanism can bring probes held by a probe card into uniform contact with a wafer even if a parallelism between a mounting reference surface for the probe card and the wafer as a test object is lost. To achieve this purpose, specifically, to adjust a parallelism of a probe card () that holds a plurality of probes () for electrically connecting a wafer () as a test object and a circuitry for generating a signal for a test with respect to the wafer (), adjusting screws () as at least part of an inclination changing unit are provided. The inclination changing unit changes a degree of inclination of the probe card () with respect to a mounting reference surface (S) of a prober () for mounting the probe card () thereon.