The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 01, 2011
Filed:
Jun. 01, 2010
Applicants:
Florian Schoen, Munich, DE;
Markus Loehndorf, Munich, DE;
Inventors:
Florian Schoen, Munich, DE;
Markus Loehndorf, Munich, DE;
Assignee:
Infineon Technologies AG, Neubiberg, DE;
Primary Examiner:
Int. Cl.
CPC ...
G01R 23/04 (2006.01);
U.S. Cl.
CPC ...
Abstract
The invention relates to MEMS resonators. In one embodiment, an integrated resonator and sensor device includes a micro-electromechanical system (MEMS) resonator, and an anchor portion coupled to the MEMS resonator and configured to allow resonance of the MEMS resonator in a first plane of motion and movement of the MEMS resonator in a second plane of motion. In other embodiments, additional apparatuses, devices, systems and methods are disclosed.