The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 01, 2011
Filed:
Jun. 26, 2008
Applicants:
Jong-won Lee, Seongnam-si, KR;
Sang-yeob Han, Anyang-si, KR;
Chang-ki Hong, Seongnam-si, KR;
Bo-un Yoon, Seoul, KR;
Jae-dong Lee, Seongnam-si, KR;
Inventors:
Jong-Won Lee, Seongnam-si, KR;
Sang-Yeob Han, Anyang-si, KR;
Chang-Ki Hong, Seongnam-si, KR;
Bo-Un Yoon, Seoul, KR;
Jae-Dong Lee, Seongnam-si, KR;
Assignee:
Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-do, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/302 (2006.01);
U.S. Cl.
CPC ...
Abstract
A slurry composition for polishing metal includes a polymeric polishing accelerating agent, the polymeric polishing accelerating agent including a backbone of hydrocarbon and a side substituent having at least one of a sulfonate ion (SO) and a sulfate ion (OSO), and an acidic aqueous solution.