The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 01, 2011
Filed:
Nov. 18, 2008
Matthew G. Goodman, Chandler, AZ (US);
Mark Hawkins, Gilbert, AZ (US);
Ravinder Aggarwal, Gilbert, AZ (US);
Michael Givens, Phoenix, AZ (US);
Eric Hill, Goodyear, AZ (US);
Gregory Bartlett, Chandler, AZ (US);
Matthew G. Goodman, Chandler, AZ (US);
Mark Hawkins, Gilbert, AZ (US);
Ravinder Aggarwal, Gilbert, AZ (US);
Michael Givens, Phoenix, AZ (US);
Eric Hill, Goodyear, AZ (US);
Gregory Bartlett, Chandler, AZ (US);
ASM America, Inc., Phoenix, AZ (US);
Abstract
Methods and systems for calibrating a temperature control system in a vapor deposition chamber. A temperature sensor senses temperature within a semiconductor processing chamber and generates an output signal. A temperature control system controls a chamber temperature by controlling a heating apparatus based on the output signal. A method includes instructing the control system to target a setpoint temperature, and depositing a layer of material onto a surface in the chamber by a vapor deposition process. A variation of a property of the layer is measured while depositing the layer, the property known to vary cyclically as a thickness of the layer increases. The measured property is allowed to vary cyclically for one or more cycles. If there is a difference between a time period of one or more of the cycles and an expected time period associated with the setpoint temperature, the temperature control system is adjusted based on the difference.