The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 01, 2011
Filed:
May. 16, 2008
Yasuhiro Yoshikawa, Kyoto, JP;
Hiroyuki Tajiri, Kyoto, JP;
Yasuhiro Yoshikawa, Kyoto, JP;
Hiroyuki Tajiri, Kyoto, JP;
Rohm Co., Ltd., Kyoto, JP;
Abstract
Provided is an acceleration sensor that has high detection sensitivity and that can enhance production efficiency. The acceleration sensor has: a ceramic substrate made of AlO; a ferroelectric layer formed in a predetermined area on the ceramic substrate by screen printing, the ferroelectric layer being made of BaTiO; a proof mass disposed so as to face the ferroelectric layer, the proof mass being formed at a predetermined distance d from the ferroelectric layer; and a first electrode and a second electrode that are formed on that side of the proof mass which faces the ferroelectric layer, so as to be fixed thereto. The first electrode and the second electrode are each formed in the shape of comb teeth, and comb tooth portions and thereof are arranged in an alternating manner.