The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 25, 2011

Filed:

Apr. 17, 2009
Applicants:

Thomas Egloff, Schwarza, DE;

Jens Knobbe, Dresden, DE;

Heinrich Grueger, Dresden, DE;

Inventors:

Thomas Egloff, Schwarza, DE;

Jens Knobbe, Dresden, DE;

Heinrich Grueger, Dresden, DE;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01J 3/28 (2006.01);
U.S. Cl.
CPC ...
Abstract

An optical apparatus includes a first substrate including an optical functional element, and a second substrate including a movable micromechanical functional element, the first substrate and the second substrate being connected in a stacked manner, so that a light path exists which is convoluted between the first substrate and the second substrate, the movable micromechanical functional element and the optical functional element being arranged in the light path. In addition, a method of producing an optical apparatus includes producing a first substrate including an optical functional element, and producing a second substrate including a movable micromechanical functional element, as well as connecting the first and second substrates, so that a light path exists which is convoluted between the first and second substrates, the movable micromechanical functional element and the optical functional element being arranged in the light path.


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